| 摘要 |
The invention provides a fan filter unit which can inhibit the temperature raise inside and can purify the sucked air synchronously. The fan filter unit is characterized by comprising at least a box body; an electric fan for air suction for sucking air to inside of the box body; a flat plate-shaped filter which is arranged inside of the box body to enable the air sucked by the electric fan for air suction to pass through from a main surface at one side to a main surface at the other side to perform the purification for the air; an air cycle heat radiation path which is independent with path of the sucked and purified air and is arranged at an outer edge part of the box body; a control part which composes the electric fan for air suction and is arranged in the air cycle heat radiation path. |
