| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and inexpensive vibration-resistant device having capability demanded by a user. SOLUTION: The vibration-resistant device 1 includes a top plate 11 supporting a surface plate, a base plate 21 placed on a floor, and a spring unit 3 which is fitted to the top plate 11 and to the base plate 21 between both plates and supports the surface plate bearing precision mechanical equipment against the floor in a vibrationless manner through a coil spring 13. A vertical unit 5 that consists of a modular vertical acceleration sensor 15 and a modular vertical VCM and/or a horizontal unit 7 that is a module consisting of a horizontal acceleration sensor and a horizontal VCM can be attached to or detached from the top plate 11 such that both units 5 and 7 are housed in a space between the top plate 11 and the base plate 21. COPYRIGHT: (C)2012,JPO&INPIT |
