RF MEMS COMPONENT COMPRISING FERROELECTRIC MATERIAL

摘要

The invention relates to an RF MEMS component with a fast activation time and intended for applications in the frequency range below about 10 GHz, comprising an insulating substrate (S) having, on the surface of said substrate, at least one RF line (LRF) located between two conductive areas (M1, M2), said RF line being at least locally covered with a layer of dielectric material (MD), said component furthermore comprising a membrane (m) located above said RF line and making contact with the two conductive areas, characterized in that said dielectric material is a ferroelectric material having a dielectric constant higher than about 600 and a remnant polarization of less than about 5 µC.cm-2. The invention also relates to a process for fabricating said component.