发明名称 |
Method for detaching semiconductor chip from foil, involves assigning process step to last frame assigned time/derived time period while showing that no edge region in image of chip is darker than predetermined brightness value |
摘要 |
<p>The method involves determining a portion of semiconductor chip (3A,3B) sticking to foil, and bending determined portion of semiconductor chip. A light is impinged to the surface of semiconductor chip to be removed. An image of semiconductor chip is captured, and checked whether an edge region (14) in image of semiconductor chip is darker than predetermined brightness value. The process step is assigned to last frame assigned time or derived time period while showing that no edge region in image of the semiconductor chip is darker than predetermined brightness value.</p> |
申请公布号 |
DE102013112666(A1) |
申请公布日期 |
2014.05.28 |
申请号 |
DE201310112666 |
申请日期 |
2013.11.18 |
申请人 |
BESI SWITZERLAND AG |
发明人 |
RODRIGUEZ, IRVING;BARMETTLER, ERNST |
分类号 |
H01L21/687;H01L21/50 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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