| 发明名称 |
TILT SURVEILLANCE APPARATUS FOR SUPERPRECISION EQUIPMENT |
| 摘要 |
<p>The present invention relates to a tilt monitoring apparatus for a high precision machine. One aspect of the disclosed technique is to provide a tilt monitoring apparatus comprising a high precision machine; three or more load cells supporting the high precision machine; and a calculation unit calculating a tilt value corresponding to the result of comparing measurement values provided from the load cells.</p> |
| 申请公布号 |
KR20140064745(A) |
申请公布日期 |
2014.05.28 |
| 申请号 |
KR20140046865 |
申请日期 |
2014.04.18 |
| 申请人 |
KOREA UNIVERSITY OF TECHNOLOGY AND EDUCATION INDUSTRY-UNIVERSITY COOPERATION FOUNDATION |
发明人 |
LEE, BYEUNG LEUL;LEE, SANG CHUL |
| 分类号 |
G01C9/00;B23Q23/00;G01L1/22;G08B21/18;H01L21/67 |
主分类号 |
G01C9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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