| 摘要 |
<p>A shielded system for reducing energy dissipation from an RF component, e.g. an inductor or capacitor, into a semiconductor substrate, the shielded system comprising: a semiconductor substrate 21; an RF component 22 in connection with the semiconductor substrate; an electrically connected shielding structure 24 having a galvanic connection to ground or the semiconductor substrate, the electrically connected shielding structure being electrically connected to the RF component; and an electrically isolated shielding structure 23 having no galvanic connection to ground, the semiconductor substrate or the RF component. The electrically connected shielding structure may be a perforated or patterned gate. The shields can be positioned between the inductor and substrate, i.e. under or beneath the inductor. The two shields help maintain the self resonance frequency (SRF) of the component.</p> |
