发明名称 Nonvolatile semiconductor memory device and method for manufacturing same
摘要 According to one embodiment, a nonvolatile semiconductor memory device includes a substrate, an electrode layer provided above the substrate, a first insulating layer provided on the electrode layer, a stacked body provided on the insulating layer, a memory film, a channel body layer, a channel body connecting portion and a second insulating layer. The stacked body has a plurality of conductive layers and a plurality of insulating film alternately stacked on each other. The memory film is provided on a sidewall of each of a pair of holes penetrating the stacked body in a direction of stacking the stacked body. The channel body layer is provided on an inner side of the memory film in each of the pair of the holes.
申请公布号 US8735965(B2) 申请公布日期 2014.05.27
申请号 US201213421471 申请日期 2012.03.15
申请人 ISHIHARA HANAE;SATO MITSURU;MATSUDA TORU;KABUSHIKI KAISHA TOSHIBA 发明人 ISHIHARA HANAE;SATO MITSURU;MATSUDA TORU
分类号 H01L29/792 主分类号 H01L29/792
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