发明名称 Method of packaging a sensor
摘要 An improved method of packaging a sensor is provided. The method includes the step of affixing a tuning fork to a platform. The tuning fork includes tines comprising one or more surfaces, with each tine further comprising an electrode and a piezoelectric material. An application specific integrated circuit (ASIC) is affixed to the platform. Electrical communication between the ASIC and the electrode of each tine is established for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork. A protective layer is applied to cover the platform and a portion of the tuning fork while maintaining a portion of a surface of each tine free from the protective layer such that the surface can displace the fluid in contact therewith.
申请公布号 US8732938(B2) 申请公布日期 2014.05.27
申请号 US20100783397 申请日期 2010.05.19
申请人 KOLOSOV OLEG;MATSIEV LEONID;VARNI JOHN F.;DALES G. CAMERON;LUDTKE OLAF;WULLNER DIRK;BUHRDORF ANDREAS;DOBRINSKI HEIKO;MEAS FRANCE;HELLA KGAA HUECK & CO. 发明人 KOLOSOV OLEG;MATSIEV LEONID;VARNI JOHN F.;DALES G. CAMERON;LUDTKE OLAF;WULLNER DIRK;BUHRDORF ANDREAS;DOBRINSKI HEIKO
分类号 H04R31/00 主分类号 H04R31/00
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