发明名称 |
APPARATUS FOR MEASURING THE AMOUNT OF INJECTED ION AND METHOD THEREBY |
摘要 |
An apparatus for measuring the amount of injected ions of a display substrate comprises a stage for attaching an operational substrate; a heat treating member; a resistance measuring member; and a driving member. The operational substrate includes a plurality of display substrates and at least one test pattern in which ions are injected. The driving member can change positions of the heat treating member and the resistance measuring member. |
申请公布号 |
KR20140063331(A) |
申请公布日期 |
2014.05.27 |
申请号 |
KR20120130563 |
申请日期 |
2012.11.16 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
KIM, HYUN GUE;SONG, BYOUNG SANG |
分类号 |
H01L21/66;H01L21/265 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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