METHOD AND APPARATUS FOR CLEANING DISPLAY PANEL

摘要

The present invention relates to a method and an apparatus for cleaning a display panel which can remove pollutants stained on the surface of a panel by radiating plasma like scanning in the width direction or in the longitudinal direction of the panel using a slit type jet nozzle formed corresponding to the width direction or the longitudinal direction of the panel to thereby treat the surface of the panel regardless of sizes of the panel. For this, the apparatus for cleaning the display panel for removing pollutants stained on the surface of the display panel comprises: a body part which includes a loading inlet disposed at one side to be able to be open and a loading outlet disposed at the other side to be able to be open and provides a space for forming a vacuum atmosphere in a state where the loading inlet and the loading outlet are closed; supporting means for supporting both ends of the panel put in through the loading inlet; a panel transferring part having transferring means to transfer the panel when the supporting means is transferred to the loading inlet or the loading outlet; and a slit type plasma source part which includes a slit type jet nozzle formed in the direction crossing to the transferring direction of the panel transferred by the panel transferring part in order to generate plasma using raw gas supplied from a raw gas supply source and to radiate the generated plasma through the slit type jet nozzle.