发明名称 PHASE CHANGE MEMORY CELL ARRAY AND METHOD OF MANUFACTURING THE SAME
摘要 <p>Disclosed are a phase change memory cell array and a method of manufacturing the same. The phase change memory cell array includes a first carbon nanotube array which is arranged on an insulator substrate in a first direction and includes a phase change material deposited by a self-alignment method, and a second carbon nanotube array which intersects with the first carbon nanotube array and is arranged in a second direction.</p>
申请公布号 KR20140063253(A) 申请公布日期 2014.05.27
申请号 KR20120130403 申请日期 2012.11.16
申请人 KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE 发明人 BAE, MYUNG HO;KIM, NAM
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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