DEPOSITION APPARATUS CONTAINING MOVING DEPOSITION SOURCE

摘要

In a deposition apparatus for depositing a thin film on the surface of a coating object in a vacuum chamber, the deposition apparatus comprises a deposition source supplying materials for forming a thin film; a supply unit for supplying at least one among cooling water, electric power and process gas to the deposition source; and a transporting unit for moving the deposition source in the vacuum chamber.