| 摘要 |
Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air. |
