| 发明名称 |
COMPOSITIONS OF NEUTRAL LAYER FOR DIRECTED SELF ASSEMBLY BLOCK COPOLYMERS AND PROCESSES THEREOF |
| 摘要 |
The present invention relates to novel neutral layer compositions and methods for using the neutral layer compositions for aligning microdomains of directed selfassembling block copolymers (BCP). The compositions and processes are useful for fabrication of electronic devices. |
| 申请公布号 |
KR20140063790(A) |
申请公布日期 |
2014.05.27 |
| 申请号 |
KR20147009536 |
申请日期 |
2012.09.21 |
| 申请人 |
AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
WU HENGPENG;CAO YI;HONG, SUNG EUN;YIN JIAN;PAUNESCU MARGARETA;NEISSER MARK O.;LIN GUANYANG |
| 分类号 |
C08L53/00;C08F297/00;C08L25/00;C08L33/12;G03F7/20 |
主分类号 |
C08L53/00 |
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