发明名称 LIQUID-APPLICATION DEVICE AND LIQUID-APPLICATION METHOD
摘要 <p>In the liquid application device 1, when the magazine 5 for feeding the substrate installed in the substrate feed part is exchanged for a new magazine 5 for feeding the substrate, the magazine 5 for collecting the substrate is removed from the substrate collecting part R2, the magazine 5 for feeding the substrate that is installed in the substrate feed part R1 so far is moved to the substrate collecting part R2 as a subsequently used magazine 5 for collecting the substrate, and then, the new magazine 5 for feeding the substrate is installed in the substrate feed part R1.</p>
申请公布号 KR20140063504(A) 申请公布日期 2014.05.27
申请号 KR20137021505 申请日期 2012.03.13
申请人 PANASONIC CORPORATION 发明人 NONOMURA MASARU;ABE SEIKOU
分类号 B05C13/00;B05D3/00;B05D7/00;H01L21/677 主分类号 B05C13/00
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