| 发明名称 |
SILICON PRODUCTION WITH A FLUIDIZED BED REACTOR INTEGRATED INTO A SIEMENS-TYPE PROCESS |
| 摘要 |
<p>A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.</p> |
| 申请公布号 |
CA2661985(C) |
申请公布日期 |
2014.05.27 |
| 申请号 |
CA20072661985 |
申请日期 |
2007.06.14 |
| 申请人 |
HEMLOCK SEMICONDUCTOR CORPORATION |
发明人 |
ARVIDSON, ARVID NEIL;MOLNAR, MICHAEL |
| 分类号 |
C01B33/035;C01B33/03 |
主分类号 |
C01B33/035 |
| 代理机构 |
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