发明名称 |
Electromechanical conversion element, liquid drop ejection head, liquid drop ejection device, and image forming apparatus |
摘要 |
Disclosed is an electromechanical conversion element, including an electromechanical conversion film including a PZT, an upper electrode formed on a top of the electromechanical conversion film and including a first strontium ruthenium oxide, and a lower electrode formed on a bottom of the electromechanical conversion film and including a second strontium ruthenium oxide, wherein Sr-pzt/Sr-sr≰0.01, wherein Sr-pzt is a SIMS intensity for a secondary ion of strontium of the PZT at a position of ½ of a thickness of the electromechanical conversion film and Sr-sr is a SIMS intensity for a secondary ion of strontium of the second strontium ruthenium oxide at a position of ½ of a thickness of the lower electrode. |
申请公布号 |
US8733906(B2) |
申请公布日期 |
2014.05.27 |
申请号 |
US201213615399 |
申请日期 |
2012.09.13 |
申请人 |
MIZUKAMI SATOSHI;SHINKAI MASARU;ISHIMORI MASAHIRO;AKIYAMA YOSHIKAZU;RICOH COMPANY, LTD. |
发明人 |
MIZUKAMI SATOSHI;SHINKAI MASARU;ISHIMORI MASAHIRO;AKIYAMA YOSHIKAZU |
分类号 |
B41J2/015 |
主分类号 |
B41J2/015 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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