发明名称 Pad sidewall spacers and method of making pad sidewall spacers
摘要 A method of making contact pad sidewall spacer and pad sidewall spacers are disclosed. An embodiment includes forming a plurality of contact pads on a substrate, each contact pad having sidewalls, forming a first photoresist over the substrate, and removing the first photoresist from the substrate thereby forming sidewall spacers along the sidewalls of the plurality of the contact pads.
申请公布号 US8736062(B2) 申请公布日期 2014.05.27
申请号 US201213587816 申请日期 2012.08.16
申请人 GATTERBAUER JOHANN;INFINEON TECHNOLOGIES AG 发明人 GATTERBAUER JOHANN
分类号 H01L23/40;H01L23/48;H01L23/52 主分类号 H01L23/40
代理机构 代理人
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