发明名称 SUBSTRATE ALIGNING APPARATUS
摘要 A substrate aligning apparatus comprises a support shaft fixed to a frame; first and second rollers facing each other, installed on the support shaft to relatively move in opposite directions by coming in contact with a substrate; and an elasticity maintaining part installed on the support shaft to elastically move at least one among the first and second rollers.
申请公布号 KR20140063213(A) 申请公布日期 2014.05.27
申请号 KR20120130322 申请日期 2012.11.16
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM, SUNG JU
分类号 H01L21/68;G02F1/13 主分类号 H01L21/68
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