| 摘要 |
Disclosed is a technique which efficiently removes the glass component contained in a used Cerium-based abrasive slurry, restores the abrasion rate, and regenerates a Cerium-based abrasive which suppresses the occurrence of abrasion damage. The Cerium-based abrasive slurry regeneration method, which regenerates a used Cerium-based abrasive slurry, is characterized by adding to the used Cerium-based abrasive slurry at least one member selected from acids not containing hydrofluoric acid, and the salts of said acids, and by placing the mixture into a slurry state and stirring at a circumferential velocity of 4 m/s or more. |
