APPARATUS OF HEATING AND COOLING FOR A LARGE SCALE GLASS

摘要

The present invention relates to a device for heating and cooling large glass. The device minimizes heat loss by performing uniform heat treatment using transfer heat of a lower substrate holder and radiating infrared rays through a heating unit installed in parallel with a substrate, and reduces total process time by performing uniform cooling from the top of the substrate using a cooling device at the lower part of the heating unit.