发明名称 STRUCTURE SEMICONDUCTEUR SUR ISOLANT AVEC DES CARACTERISTIQUES ELECTRIQUES AMELIOREES
摘要 <p>A semiconductor structure comprising a first semiconductor layer, a bulk semiconductor layer, an insulation layer between the first semiconductor layer and the bulk semiconductor layer, a first implanted region that is at least partially within the insulation layer; and a second doped region that is at least partially within the bulk semiconductor layer, wherein the first implanted region has an implant profile that shows a maximum within the insulation layer and a tail extending within the bulk semiconductor layer so as to inhibit the diffusion of a second doping material of the second doped region within the insulation layer.</p>
申请公布号 FR2983635(B1) 申请公布日期 2014.05.23
申请号 FR20110061169 申请日期 2011.12.05
申请人 SOITEC 发明人 BOURDELLE KONSTANTIN
分类号 H01L21/22;H01L21/26;H01L21/335 主分类号 H01L21/22
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