发明名称 |
APPARATUS AND METHODS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF POLYMER COATINGS |
摘要 |
Apparatuses and methods are described that involve the deposition of polymer coatings on substrates. The polymer coatings generally comprise an electrically insulating layer and/or a hydrophobic layer. The hydrophobic layer can comprise fused polymer particles have an average primary particle diameter on the nanometer to micrometer scale. The polymer coatings are deposited on substrates using specifically adapted plasma enhanced chemical vapor deposition approaches. The substrates can include computing devices and fabrics. |
申请公布号 |
WO2014078488(A1) |
申请公布日期 |
2014.05.22 |
申请号 |
WO2013US70017 |
申请日期 |
2013.11.14 |
申请人 |
LIQUIPEL IP LLC |
发明人 |
GALBREATH, HERBERT, VINCENT;HILL, ALEXANDER;STOREY, DANIEL |
分类号 |
H01L21/205;B05D7/00;C09D201/00 |
主分类号 |
H01L21/205 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|