| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that plasma generation with a decompression chamber to generate ozone used for ashing and plasma cleaning has high equipment cost and process cost in the decompression process, and it is difficult to reduce the cost of ozone generation.SOLUTION: Ozone is generated based on an atmospheric pressure plasma CVD relying on a dielectric barrier discharge by using a plasma head provided by arraying, in parallel, multiple plasma head unit members for generating a plasma by impressing an electric field or magnetic field via dielectric members. A stable glow discharge plasma can be formed even at atmospheric pressure because of the dielectric discharge, and since ozone can be generated at atmospheric pressure, it becomes possible to manufacture a semiconductor device at a low cost, for example. |
