| 摘要 |
An SPR sensor is provided, comprising: a substrate (11), which is made of transparent inorganic material; an adhesion layer (12) formed on the substrate (11), which is made of Cr or Ti; an adhesion enhancing layer (13) formed on the adhesion layer (12), which is made of Au or Au containing alloy; a metal functional layer (14) formed on the adhesion enhancing layer (13), which is made of Ag. By inserting the adhesion enhancing layer (13) made of Au or Au containing alloy between the Cr or Ti adhesion layer (12) and the Ag metal functional layer (14), the metal functional layer (14) made of Ag is firmly adhered to the transparent inorganic substrate (11) to ensure the long term stability of the performance of the SPR sensor. |
