发明名称 |
PATTERN FORTIFICATION FOR HDD BIT PATTERNED MEDIA PATTERN TRANSFER |
摘要 |
A method and apparatus for forming a magnetic layer having a pattern of magnetic properties on a substrate is described. The method includes using a metal nitride hardmask layer to pattern the magnetic layer by plasma exposure. The metal nitride layer is patterned using a nanoimprint patterning process with a silicon oxide pattern negative material. The pattern is developed in the metal nitride using a halogen and oxygen containing remote plasma, and is removed after plasma exposure using a caustic wet strip process. All processing is done at low temperatures to avoid thermal damage to magnetic materials. |
申请公布号 |
WO2014078124(A1) |
申请公布日期 |
2014.05.22 |
申请号 |
WO2013US68436 |
申请日期 |
2013.11.05 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GOUK, ROMAN;VERHAVERBEKE, STEVEN;KONTOS, ALEXANDER;ALLEN, ADOLPH MILLER;MORAES, KEVIN |
分类号 |
G11C11/15 |
主分类号 |
G11C11/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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