SYSTEM AND METHOD FOR SELECTIVELY REMOVING ATOMS

摘要

A method for selective removal of atoms from a substrate: comprising forming a patterned mask over at least a portion of the surface of the substrate to form a masked portion and an unmasked portion of the surface; exposing the surface to low energy light ions, wherein the low energy light ions selectively remove atoms from the unmasked portion of the substrate. The method creates a plurality of magnetic domains on a magnetically susceptible substrate to form a magnetic medium such as magnetic memory devices.