SHAPE MEASUREMENT DEVICE, IMPEDANCE DETECTOR, AND IMPEDANCE DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To easily detect the impedance of a cable that has a curved part connected to a movable part.SOLUTION: A three-dimensional measuring machine 101 has a probe 13 for detecting the shape of an object to be measured and outputting a signal indicating a shape detection result. The probe interface 110 receives a signal indicating the shape detection result. A cable 13A transmits a signal indicating the shape detection result between the probe 13 and probe interface 110, and curves as the probe 13 moves. The probe interface 110 has an impedance detector 111 with an arithmetic logical unit that detects the impedance of the cable 13A. The impedance detector 111 transmits high speed test data TH to the probe 13 via the cable 13A, and detects the impedance of the cable 13A according to whether it has received a reception confirmation signal Sd output by the probe 13.