发明名称 |
SELF-ASSEMBLED STRUCTURES, METHOD OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME |
摘要 |
Disclosed herein is a composition comprising a graft block copolymer comprising a copolymer comprising a backbone polymer; and a first graft polymer that comprises a surface energy reducing moiety; the first graft polymer being grafted onto the backbone polymer; where the surface energy reducing moiety comprises a fluorine atom, a silicon atom, or a combination of a fluorine atom and a silicon atom; a photoacid generator; and a crosslinking agent. |
申请公布号 |
US2014141375(A1) |
申请公布日期 |
2014.05.22 |
申请号 |
US201213681026 |
申请日期 |
2012.11.19 |
申请人 |
CHO SANGHO;SUN GUORONG;WOOLEY KAREN L.;THACKERAY JAMES W.;TREFONAS, III PETER |
发明人 |
CHO SANGHO;SUN GUORONG;WOOLEY KAREN L.;THACKERAY JAMES W.;TREFONAS, III PETER |
分类号 |
G03F7/004;G03F7/20 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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