| 摘要 |
<p>Method for assigning a pupil facet of a pupil facet mirror of an illumination optical unit (23) of a projection exposure apparatus (1) to a field facet of a field facet mirror (6) of the illumination optical unit for the definition of an illumination channel for a partial beam of illumination light (3), which, proceeding from a light source, is reflected at the field facet and at the pupil facet assigned by means of the method toward an object field illuminated by the illumination optical unit.</p> |
