OPTIMIZATION OF CONVEYOR BELTS USED FOR WORKPIECE PROCESSING
摘要
A system and method for the handling of workpieces in a workpiece processing system is disclosed. The system utilizes three conveyor belts, where one may be a loading belt, feeding unprocessed workpieces from its associated workpiece carrier to a processing system. A second conveyor belt may be an unloading belt, receiving processed workpieces from the processing system and filling its associated workpiece carrier. The third conveyor belt may be exchanging its workpiece carrier during this time, so that it is available to start operating as the loading belt once all of the workpieces have been removed from the workpiece carrier associated with the first conveyor belt.
申请公布号
WO2014046903(A3)
申请公布日期
2014.05.22
申请号
WO2013US58879
申请日期
2013.09.10
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
发明人
VOPAT, ROBERT B.;DANIEL, MALCOLM N.;BONECUTTER, LUKE;SCHALLER, JASON M.;CARLSON, CHARLES T.;WEAVER, WILLIAM T.