发明名称 |
IMAGE PROCESSOR, METHOD FOR GENERATING PATTERN USING SELF-ORGANIZING LITHOGRAPHIC TECHNIQUES AND COMPUTER PROGRAM |
摘要 |
<p>An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed Self-Assembly (DSA), and the processor, method, and computer program are characterized in that a template for addressing is prepared on the basis of guide pattern data used for patterning by DSA. The above configuration makes it possible to provide an addressing pattern suitable for visual field positioning in measuring or inspecting a pattern formed through the patterning process using DSA.</p> |
申请公布号 |
WO2014077303(A1) |
申请公布日期 |
2014.05.22 |
申请号 |
WO2013JP80753 |
申请日期 |
2013.11.14 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SUTANI TAKUMICHI;ISAWA MIKI;KOSHIHARA SHUNSUKE;SUGIYAMA AKIYUKI |
分类号 |
H01L21/027;B82Y40/00;G01B15/04 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|