| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring a pattern capable of easily and accurately measuring a dimension of a pattern in a retardation film.SOLUTION: The device for measuring a pattern illuminates a pattern of a retardation film 20 disposed on a measurement table 40 with infrared light through a polarizing film 15 and photographs the pattern by two cameras though a polarizing filter 36 together with reference patterns 11, 12, respectively. An information processing device calculates a distance between patterns from an image photographed by the one camera and an image photographed by the other camera. The polarizing directions of the polarizing film 15 and the polarizing filter 36 are orthogonal to each other, alignment directions of the pattern are orthogonal to each other, and the alignment direction of the pattern forms an angle of 20° or more and 70° or less with respect to the polarizing direction of the polarizing film 15. |
