| 摘要 |
There is provided a powder deposition apparatus including a drum-like rotating body disposed in a vacuum container and configured to rotate in a vertical direction, a deposition source disposed inside the drum-like rotating body, a tubular powder supplying/recovering member disposed close to an inner wall of the drum-like rotating body and configured to recover powder coming through an upper face and to supply the powder to the inner wall through a lower face, and a lid member provided in a vicinity of the lower face of the powder supplying/recovering member and configured to supply the powder to the inner wall through the lower face of the powder supplying/recovering member by being allowed in an open state and to accumulate the powder coming in the powder supplying/recovering member through the upper face by being allowed in a closed state. |
