发明名称 |
POWER MODULE AND METHOD OF MANUFACTURING POWER MODULE |
摘要 |
PROBLEM TO BE SOLVED: To provide a power module excellent in bonding strength and bonding reliability in a cooling cycle between a semiconductor element and a circuit layer, and to provide a method of manufacturing the power module.SOLUTION: A power module 1 comprises: a substrate 10 for the power module in which a circuit layer 12 composed of copper or copper alloy is disposed on one surface of a ceramic substrate 11; and a semiconductor element 3 mounted above the circuit layer 12. The semiconductor element is bonded by an Ag sintered layer 31 formed on the circuit layer 12 and composed of a sintered body of Ag in which silver oxide is reduced. The Ag sintered layer 31 is directly bonded to the circuit layer, and its porosity ranges from 20% to 60%. |
申请公布号 |
JP2014096545(A) |
申请公布日期 |
2014.05.22 |
申请号 |
JP20120248773 |
申请日期 |
2012.11.12 |
申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
NISHIMOTO SHUJI;NAGATOMO YOSHIYUKI;NAGASE TOSHIYUKI |
分类号 |
H01L21/52;H01L25/07;H01L25/18 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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