| 摘要 |
<p>PROBLEM TO BE SOLVED: To cover the periphery of a main hearth by a suitable mode in a vertical film forming apparatus.SOLUTION: In a film forming apparatus 1, the movement of an outer rim 31 in the horizontal direction is restricted by a support member 33. As a result, the outer rim 31 can maintain a state supported by the support member 33 without falling. The thickness of a deposit can be made approximately uniform over the whole circumference by the rotation of the outer rim 31. Consequently, the frequency of maintenance can be greatly reduced.</p> |
