| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing device of a thin-film solar cell capable of forming a plurality of isolation grooves with high positional accuracy even when performing processing using a plurality of laser processing devices in a separation line forming step by a laser scribe method.SOLUTION: A manufacturing device of a thin-film solar cell includes a plurality of first isolation groove forming devices, a photoelectric conversion layer forming device, a plurality of second isolation groove forming devices, and a control device. The first isolation groove forming device forms a plurality of first isolation grooves on a transparent electrode layer on a substrate. The photoelectric conversion layer forming device forms a photoelectric conversion layer on the transparent electrode layer. The second isolation groove forming device forms a plurality of second isolation grooves on the photoelectric conversion layer. The control device controls the first isolation groove forming device and the second isolation groove forming device. The second isolation groove forming device forms a distance between the first isolation groove and the second isolation groove on the basis of a first setting value. The control device sets the first setting value on the basis of processing history information of the thin-film solar cell.</p> |
