METHOD FOR MANUFACTURING MASTER PLATE FOR MAKING MICROCONTACT PRINTING STAMP, MASTER PLATE FOR MAKING MICROCONTACT PRINTING STAMP, AND METHOD FOR MANUFACTURING MICROCONTACT PRINTING STAMP

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a master plate for making a micro-contact printing (μCP) stamp, by which aμCP stamp capable of uniform pattern printing in a large area can be manufactured through an easy process.SOLUTION: A method for manufacturing aμCP stamp includes: a coating step in which a master plate for making aμCP stamp having a micro concavo-convex pattern formed on a surface thereof is used and PDMS (polydimethyl siloxane) is applied on the surface, where the micro concavo-convex pattern is formed, of the master plate for making aμCP stamp; an adhering step in which a support material is used and the support material is adhered to the PDMS film applied as described above; and a peeling step in which the PDMS film and the support material are peeled from the master plate for making aμCP stamp. The master plate for making aμCP stamp includes a substrate, a photosensitive resin layer comprising a photosensitive resin which is patterned on the substrate, and a light-shielding part formed on the substrate surface where the photosensitive resin layer is not formed.