发明名称 |
Diagnostic method and apparatus for characterization of a neutral beam and for process control therewith |
摘要 |
<p>An apparatus and method for characterizing a particle beam provides receiving a particle beam in a central region of a reduced pressure enclosure; impacting the received beam against a beam strike that is thermally isolated from the enclosure; measuring a temperature change of the beam strike due to the impacting beam; measuring a pressure change in the enclosure due to receiving the beam; and processing the measured temperature change and the measured pressure change to determine beam characteristics.</p> |
申请公布号 |
AU2012328776(A1) |
申请公布日期 |
2014.05.22 |
申请号 |
AU20120328776 |
申请日期 |
2012.10.25 |
申请人 |
EXOGENESIS CORPORATION |
发明人 |
KIRKPATRICK, SEAN R.;KIRKPATRICK, ALLEN R. |
分类号 |
H01L21/44 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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