STAGE DEVICE AND METHOD FOR ADJUSTING THE SAME, EXPOSURE SYSTEM, AND METHOD FOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a stage device capable of measuring the rotation of a stage at high accuracy.SOLUTION: A stage device includes: a stage 1; an interference measuring instrument 4 arranged so that the position of a surface of a mirror 12 disposed on a side face of the stage can be measured; a drive part 205 positioning the stage on the basis of a measurement result obtained by the interference measuring instrument. The interference measuring instrument includes: a varying part 16 periodically varying an incident position where measuring light enters the mirror; and a detecting part 14 detecting the rotation of the mirror on the basis of the variation amount of a measurement result obtained by the interference measuring instrument, the variation amount being generated in accordance with a periodical variation of the incident position.