| 摘要 |
PROBLEM TO BE SOLVED: To provide a high performance inertial sensor capable of keeping SNR even in an environment having vibration disturbance.SOLUTION: The oscillatory type inertial sensor includes: two weights (excitation elements) 2 and 3; means (C1, C2, C3, C4, +Vd, and -Vd) for displacing them to the opposite phase; two sets of electrodes (C5, C6, C7, and C8) for detecting their displacements as capacitance variation; and a CV converting section 53 for converting the capacitance variation of the electrodes into an electric signal. One set of electrodes (for example, C5 and C8) whose electrostatic capacitances increase when the two weights 2 and 3 are displaced to the opposite phase are electrically interconnected, and one set of electrodes (for example, C6 and C7) whose electrostatic capacitances decrease in the same case are electrically interconnected, and each set is connected to the CV converting section 53. |
