APPARATUS FOR TRANSFERING SUBSTRATE AND PROCESSING SUBSTRATE

摘要

The present invention relates to a substrate transferring device and a substrate processing device and, more specifically, a substrate transferring device and a substrate processing device which has a thin film crystallized on a transferred substrate during processing of the substrate. The substrate transferring device according to an embodiment of the present invention comprises a transfer unit slid by an air bearing and an absorbing unit absorbing the pressure of air bounced off after being sprayed to the air bearing. The substrate processing device according to an embodiment of the present invention comprises: a pair of guide rails placed in a first axis direction and spaced apart from each other; a first axis transfer unit which has the length in a second axis direction to connect the guide rails and which is slid back and forth in the first axis direction along the guide rails by the air bearing provided on the lower surface thereof; a rotary shaft guide inserted into the center of the second shaft transfer unit; a substrate supporting unit provided on the upper part of the rotary shaft guide; and an absorbing unit surrounding the circumference of the air bearing and absorbing the pressure of air sprayed by the air bearing and bounced off.