| 发明名称 |
PLASMA GENERATOR AND CLEANING AND PURIFYING APPARATUS INCLUDING THE SAME |
| 摘要 |
A cleaning and purifying apparatus 40 detects an abnormal event that occurs during use of the plasma generator 1 and controls plasma discharge based on the result of detection. |
| 申请公布号 |
US2014138029(A1) |
申请公布日期 |
2014.05.22 |
| 申请号 |
US201214130901 |
申请日期 |
2012.06.06 |
| 申请人 |
NARITA KENJI;SANEMATSU WATARU;PANASONIC CORPORATION |
发明人 |
NARITA KENJI;SANEMATSU WATARU |
| 分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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