| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyance facility which allows for efficient conveyance of a container to a substrate take-out place, while simplifying the configuration.SOLUTION: A substrate conveyance facility includes a ceiling carrier 6 traveling along a travel rail 20 and conveying a container 3 to a container conveyance place 1, and a substrate conveyance device 8 for taking out a substrate 4 from the container 3 located at a substrate take-out place 2, and conveying the substrate to a substrate processing apparatus 7. A relay conveyance device 5 conveys the container 3 between the container conveyance place 1 and the substrate take-out place 2, by moving a mounting part 11 for mounting the container 3 in the horizontal direction. The substrate conveyance device 8 is configured to take out the substrate 4 from the container 3 which is located at the substrate take-out place 2 while being mounted on the mounting part 11, and to convey the substrate 4 freely to the substrate processing apparatus 7. |
