PICKUP METHOD AND PICKUP DEVICE

摘要

PROBLEM TO BE SOLVED: To effectively use chips having a pattern different from chips that can be picked up for detecting chip deviations.SOLUTION: In the pickup method, a wafer 10 includes as chips 2 regular chips P that can be picked up and peculiar chips T having a pattern different from the regular chips P. Each of chip groups G1 to G15 includes regular chips P and one peculiar chip T. In each of the chip groups G1 to G15, a peculiar chip T is finally moved to a recognizable position and whether chips 2 are deviated or not is determined on the basis of a recognition result of the peculiar chip T.