Method for blister-free passivation of a silicon surface

摘要

A method for forming a surface passivation layer on a surface of a crystalline silicon substrate, the method comprising:
- depositing an Al 2 O 3 layer on the surface, the Al 2 O 3 layer having a thickness not exceeding 15nm;
- performing an outgassing process at a temperature in the range between 500°C and 900°C, after said deposition of said Al 2 O 3 layer on said surface;;
- after the outgassing process, depositing at least one additional dielectric layer such as a silicon nitride layer and/or a silicon oxide layer on the Al 2 O 3 layer.