Apparatus for structured illumination of a specimen

摘要

An apparatus for structured illumination of a specimen (32) comprises an illumination device (10) for generating illumination beams (12). The illumination beams (12) are incident on a mask device (26), wherein openings (24) provided in the mask device (26) serve for generating a mask image. The mask image is imaged within the specimen (32) with the aid of an objective (30). Detection beams (38) generated by the specimen are captured by a detection device (42). For increasing the intensity of the observation beams entering the specimen (32), those beams which do not pass through the openings (24), are collected with the aid of a beam collector (20) and guided back to the mask device (26).