| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of obtaining easily three-dimensional shape on the surface of a test piece, while preventing cost increase and large-sizing of the device. SOLUTION: In the scanning electron microscope, a test piece is scanned by converging electron beams by an objective lens, and a first image is formed by detecting a signal generated from the test piece and then, it is displayed on a screen of a display device; after changing magnetic excitation of the objective lens, the electron beams are converged and the test piece is scanned, and a second image is formed by detecting the signal generated from the test piece and is displayed on the screen of the display device; then, a voltage applied on a control electrode is adjusted so that the focal point of the second image displayed on the screen of the display device may be corrected, and then, the electron beams are converged to scan the test piece, and by detecting the signal generated from the test piece, a third image is formed and displayed on the screen of the display device. COPYRIGHT: (C)2011,JPO&INPIT |
