MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

The present invention relates to a copper based metallic film etchant composite including A) hydrogen peroxide (H_2O_2), B) pH adjusting agent and C) water. By using the etchant composite of the present invention, a pattern can be formed through bulk etching, when a single layer or multiple metallic layers comprising a copper based metallic film are etched, and a taper profile with excellent linearity can be realized without interface deformation of the etched copper base metallic film.