发明名称
摘要 To provide a method for manufacturing a large semiconductor device which easily operates normally and has excellent current characteristics. A first single-crystal semiconductor layer is provided over an insulating substrate. Then, the first single-crystal semiconductor layer is processed into an island shape. After that, a second single-crystal semiconductor layer is provided over the insulating substrate so as to overlap with part of a region where the first single-crystal semiconductor layer is provided. After that, the second single-crystal semiconductor layer is processed into an island shape. Thus, defects at joint portions in the case of providing the single-crystal semiconductor layers can be reduced.
申请公布号 JP5500793(B2) 申请公布日期 2014.05.21
申请号 JP20080167487 申请日期 2008.06.26
申请人 发明人
分类号 H01L27/12;H01L21/02;H01L21/336;H01L29/786 主分类号 H01L27/12
代理机构 代理人
主权项
地址